Large area high density quantized magnetic disks fabricated using nanoimprint lithography
نویسندگان
چکیده
A new low-cost, high throughput method was developed for fabricating large area quantized magnetic disks ~QMDs! using nanoimprint lithography ~NIL!, electroplating, and chemical mechanical polishing. Perpendicular QMDs with a density of 18 Gbit/in. and good uniformity over an area of 4 cm34 cm ~total 45 Gbit! have been achieved, as well as longitudinal QMDs of 30 Gbit/in. The NIL molds for the perpendicular QMDs were fabricated using double NIL with a grating mold. The magnetic properties of both types of QMDs were studied by magnetic force microscopy. © 1998 American Vacuum Society. @S0734-211X~98!15406-9#
منابع مشابه
Perpendicular quantized magnetic disks with 45 Gbits on a 4 3 4 cm 2 area
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